MOCVD, PLD, PVD

Category:
LEM

Gas Mixing & Controlling System of GaN MOCVD

  1. NH3 line gas mixing & Controlling
  2. SiH4 line gas mixing & controlling
  3. Run-vent line gas  mixing & controlling
  4. MO source line gas mixing & controlling

The attendee will get the knowledge, how to design gas mixing and controlling of a CVD system.