Vito Chen

Senior LEM Specialist, Physical Technologies Unit

Focused on Deposition Systems

Lab Equipment Maintenance Personnel

Education

B.Sc., Chemical Machinery, Jiangsu Institute of Petroleum and Chemical Engineering, Jiangsu, PR China,1994

Professional Profile

Certification

  • Aixtron MOCVD
  • SMI MOCVD

Specialization

CVD machines, dry pumps, gas regulators, mass flow controllers and pressure controllers, PLC and I/O modules.

Additional Information

More than 20 years’ experience on MOCVD service and maintenance. Familiar with thin film thickness detector systems, purified gas delivery systems, gas purifiers, gas abatement systems, and toxic gas detector systems.